Inventor · disambiguated record

Nadja Orlova

Also filed as: ORLOVA NADJA

1 granted patent·6 citations·filing 2003–2003

28Inventor score

Technology areasG01B

Files withWAFERTECH LLC1

Top patents by PatentIndex Score

1 record

0143US7142314B2Wafer stage position calibration method and systemWAFERTECH LLC·Filed 2003·Granted Nov 28, 2006·6 cites·26 claims

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