Inventor

BAEK JONGHOON

US26 patents

⚠️ This page may combine multiple inventors who share the name “BAEK JONGHOON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BAEK JONGHOON

APPLIED MATERIALS INC

Dry-etch selectivity

Semiconductor processing with DC assisted RF power for improved control

Dry-etch selectivity

Semiconductor processing with DC assisted RF power for improved control

Particle generation suppressor by DC bias modulation

Particle generation suppresor by DC bias modulation

Particle generation suppresor by DC bias modulation

Film stack overlay improvement

Electrostatic chuck with multiple radio frequency meshes to control plasma uniformity

Electrostatic chuck with multiple radio frequency meshes to control plasma uniformity

Device and method for tuning plasma distribution using phase control

Tightly fitted ceramic insulator on large area electrode

ASML NETHERLANDS BV

System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector

Cleaning a structure surface in an EUV chamber

System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector

Cleaning a structure surface in an EUV chamber

System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector

System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector

BAEK JONGHOON

Mixing frequency at multiple feeding points

Off-center ground return for RF-powered showerhead

Anti-arc zero field plate

Balancing RF bridge assembly

SAMSUNG ELECTRONICS CO LTD

Semiconductor device including dummy gate patterns and manufacturing method thereof

Semiconductor device

Semiconductor device

KUDELA JOZEF

Tightly fitted ceramic insulator on large area electrode