Inventor · disambiguated record

Chang Uk Park

Also filed as: PARK CHANG UK

2 granted patents·11 citations·filing 2017–2017

55Inventor score

Technology areasG03F H10P

Files withSEMES CO LTD2

Top patents by PatentIndex Score

2 records

0186US10274827B2Substrate treating apparatus and substrate treating methodSEMES CO LTD·Filed 2017·Granted Apr 30, 2019·4 cites·4 claims
0283US10682674B2Apparatus and method for treating substrateSEMES CO LTD·Filed 2017·Granted Jun 16, 2020·7 cites·10 claims

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