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Inventor
LACH JUSTIN
US
2 patents
Patents
2 patents
US12332182B2
Jun 17, 2025
System for automatic diagnostics and monitoring of semiconductor defect die screening performance through overlay of defect and electrical test data
KLA CORP
0 citations
47
US12422376B2
Sep 23, 2025
Imaging reflectometry for inline screening
KLA CORP
0 citations
46