Inventor
KAMATA ISAHO
JP27 patents
⚠️ This page may combine multiple inventors who share the name “KAMATA ISAHO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NUFLARE TECHNOLOGY INC
5 patentsUS9518322B2Dec 13, 2016
Film formation apparatus and film formation method
NUFLARE TECHNOLOGY INC11 citations83
US9873941B2Jan 23, 2018
Film-forming manufacturing apparatus and method
NUFLARE TECHNOLOGY INC5 citations72
US10896831B2Jan 19, 2021
Film forming apparatus
NUFLARE TECHNOLOGY INC1 citations61
US9570337B2Feb 14, 2017
Film formation apparatus and film formation method
NUFLARE TECHNOLOGY INC1 citations51
US10584417B2Mar 10, 2020
Film forming apparatus, susceptor, and film forming method
NUFLARE TECHNOLOGY INC0 citations41
DENSO CORP
5 patentsUS9879359B2Jan 30, 2018
Silicon carbide semiconductor film-forming apparatus and film-forming method using the same
DENSO CORP2 citations72
US12071709B2Aug 27, 2024
Methods for manufacturing silicon carbide single crystal ingot and silicon carbide single crystal wafer
DENSO CORP2 citations70
US12252808B2Mar 18, 2025
Silicon carbide single crystal wafer, and methods for manufacturing silicon carbide single crystal ingot and the silicon carbide single crystal wafer
DENSO CORP0 citations60
US11846040B2Dec 19, 2023
Silicon carbide single crystal
DENSO CORP0 citations59
US10181517B2Jan 15, 2019
Silicon carbide single crystal, silicon carbide single crystal wafer, silicon carbide single crystal epitaxial wafer, and electronic device
DENSO CORP0 citations51
SHOWA DENKO KK
3 patentsUS10262863B2Apr 16, 2019
Method for manufacturing SiC epitaxial wafer by simultaneously utilizing an N-based gas and a CI-based gas, and SiC epitaxial growth apparatus
SHOWA DENKO KK2 citations72
US11906569B2Feb 20, 2024
Semiconductor wafer evaluation apparatus and semiconductor wafer manufacturing method
SHOWA DENKO KK0 citations62
US11107892B2Aug 31, 2021
SiC epitaxial wafer and method for producing same
SHOWA DENKO KK0 citations61
KANSAI ELECTRIC POWER CO
3 patentsUS7960257B2Jun 14, 2011
Silicon carbide semiconductor device and manufacturing method therefor
KANSAI ELECTRIC POWER CO1 citations62
US7960738B2Jun 14, 2011
Silicon carbide semiconductor device and manufacturing method therefor
KANSAI ELECTRIC POWER CO1 citations62
US7960737B2Jun 14, 2011
Silicon carbide semiconductor device and manufacturing method therefor
KANSAI ELECTRIC POWER CO2 citations62
CENTRAL RES INST ELECT
2 patentsSUZUKI KUNIHIKO
2 patentsMOMOSE KENJI
2 patentsUS8716718B2May 6, 2014
Epitaxial SiC single crystal substrate and method of manufacture of epitaxial SiC single crystal substrate
MOMOSE KENJI15 citations81
US8293623B2Oct 23, 2012
Epitaxial SiC single crystal substrate and method of manufacture of epitaxial SiC single crystal substrate
MOMOSE KENJI3 citations60