Inventor
Siladie Cristian
US4 patents
Patents
4 patentsUS10651015B2May 12, 2020
Variable depth edge ring for etch uniformity control
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US10825659B2Nov 3, 2020
Substrate processing chamber including multiple gas injection points and dual injector
LAM RES CORP8 citations79
US10302553B2May 28, 2019
Gas exhaust by-product measurement system
LAM RES CORP4 citations71
US11342163B2May 24, 2022
Variable depth edge ring for etch uniformity control
LAM RES CORP0 citations58