Inventor
BRUNNER ROLAND
DE7 patents
⚠️ This page may combine multiple inventors who share the name “BRUNNER ROLAND”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
WACKER SILTRONIC HALBLEITERMAT
4 patentsUS5695572ADec 9, 1997
Cleaning agent and method for cleaning semiconductor wafers
WACKER SILTRONIC HALBLEITERMAT24 citations87
US6503335B2Jan 7, 2003
Centrifuge and method for centrifuging a semiconductor wafer
WACKER SILTRONIC HALBLEITERMAT25 citations86
US6412500B1Jul 2, 2002
Device and method for cleaning semiconductor wafers
WACKER SILTRONIC HALBLEITERMAT11 citations68
US6451124B1Sep 17, 2002
Process for the chemical treatment of semiconductor wafers
WACKER SILTRONIC HALBLEITERMAT6 citations60