Inventor
KABOUZI YASSINE
US14 patents
⚠️ This page may combine multiple inventors who share the name “KABOUZI YASSINE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
12 patentsUS10134569B1Nov 20, 2018
Method and apparatus for real-time monitoring of plasma chamber wall condition
LAM RES CORP22 citations93
US9735069B2Aug 15, 2017
Method and apparatus for determining process rate
LAM RES CORP5 citations72
US9640371B2May 2, 2017
System and method for detecting a process point in multi-mode pulse processes
LAM RES CORP2 citations72
US9548189B2Jan 17, 2017
Plasma etching systems and methods using empirical mode decomposition
LAM RES CORP2 citations72
US10903050B2Jan 26, 2021
Endpoint sensor based control including adjustment of an edge ring parameter for each substrate processed to maintain etch rate uniformity
LAM RES CORP4 citations71
US10302553B2May 28, 2019
Gas exhaust by-product measurement system
LAM RES CORP4 citations71
US11056322B2Jul 6, 2021
Method and apparatus for determining process rate
LAM RES CORP0 citations62
US10242849B2Mar 26, 2019
System and method for detecting a process point in multi-mode pulse processes
LAM RES CORP1 citations62
US11885750B2Jan 30, 2024
Integrated wafer bow measurements
LAM RES CORP0 citations61
US10504704B2Dec 10, 2019
Plasma etching systems and methods using empirical mode decomposition
LAM RES CORP0 citations51
US10930478B2Feb 23, 2021
Apparatus with optical cavity for determining process rate
LAM RES CORP0 citations44
US10784174B2Sep 22, 2020
Method and apparatus for determining etch process parameters
LAM RES CORP0 citations40