Inventor
MCINERNEY EDWARD J
US16 patents
⚠️ This page may combine multiple inventors who share the name “MCINERNEY EDWARD J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NOVELLUS SYSTEMS INC
9 patentsUS6143082ANov 7, 2000
Isolation of incompatible processes in a multi-station processing chamber
NOVELLUS SYSTEMS INC672 citations96
US5843233ADec 1, 1998
Exclusion guard and gas-based substrate protection for chemical vapor deposition apparatus
NOVELLUS SYSTEMS INC51 citations96
US6319553B1Nov 20, 2001
Isolation of incompatible processes in a multi-station processing chamber
NOVELLUS SYSTEMS INC79 citations93
US6918824B2Jul 19, 2005
Uniform fluid distribution and exhaust system for a chemical-mechanical planarization device
NOVELLUS SYSTEMS INC22 citations92
US6397861B1Jun 4, 2002
Situ plasma clean gas injection
NOVELLUS SYSTEMS INC21 citations91
US6277235B1Aug 21, 2001
In situ plasma clean gas injection
NOVELLUS SYSTEMS INC24 citations91
US5901271AMay 4, 1999
Process of evaporating a liquid in a cyclone evaporator
NOVELLUS SYSTEMS INC30 citations91
US5653813AAug 5, 1997
Cyclone evaporator
NOVELLUS SYSTEMS INC39 citations91
US6561796B1May 13, 2003
Method of semiconductor wafer heating to prevent bowing
NOVELLUS SYSTEMS INC23 citations90
GEN ELECTRIC
3 patentsUS5371113ADec 6, 1994
Polyurethane foam of low thermal conductivity and method of preparation
GEN ELECTRIC8 citations72
US3993621ANov 23, 1976
Reinforced styrene acrylonitrile copolymer having improved temperature resistant properties
GEN ELECTRIC11 citations69
US5397809AMar 14, 1995
Polyurethane foam of low thermal conductivity and method of preparation
GEN ELECTRIC3 citations61