Inventor
NISHIKAWARA TOMOFUMI
JP5 patents
Patents
5 patentsUS7394522B2Jul 1, 2008
Exposure apparatus and device manufacturing method
CANON KK12 citations82
US12502894B2Dec 23, 2025
Liquid discharge apparatus, substrate processing apparatus and article manufacturing method
CANON KK0 citations56
US9823562B2Nov 21, 2017
Imprint apparatus, imprint method, and method of manufacturing article
CANON KK1 citations49
US9341468B2May 17, 2016
Measuring apparatus
CANON KK0 citations49
US7630056B2Dec 8, 2009
Exposure apparatus and device manufacturing method
CANON KK1 citations46