Inventor

HAMILTON SHAWN

US9 patents

⚠️ This page may combine multiple inventors who share the name “HAMILTON SHAWN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NOVELLUS SYSTEMS INC

4 patents

US7960297B1Jun 14, 2011

Load lock design for rapid wafer heating

NOVELLUS SYSTEMS INC44 citations96

US8033769B2Oct 11, 2011

Loadlock designs and methods for using same

NOVELLUS SYSTEMS INC42 citations91

US8052419B1Nov 8, 2011

Closed loop temperature heat up and control utilizing wafer-to-heater pedestal gap modulation

NOVELLUS SYSTEMS INC23 citations90

US9496159B2Nov 15, 2016

Wafer position correction with a dual, side-by-side wafer transfer robot

NOVELLUS SYSTEMS INC1 citations46

RIVKIN MICHAEL

1 patent

US8273670B1Sep 25, 2012

Load lock design for rapid wafer heating

RIVKIN MICHAEL16 citations87

GENETTI DAMON

1 patent

US9002514B2Apr 7, 2015

Wafer position correction with a dual, side-by-side wafer transfer robot

GENETTI DAMON12 citations80

NORDIN MICHAEL

1 patent

US8920162B1Dec 30, 2014

Closed loop temperature heat up and control utilizing wafer-to-heater pedestal gap modulation

NORDIN MICHAEL9 citations77

GAGE CHRIS

1 patent

US8491248B2Jul 23, 2013

Loadlock designs and methods for using same

GAGE CHRIS3 citations60

LAM RES CORP

1 patent

US9863041B2Jan 9, 2018

Internally heated porous filter for defect reduction with liquid or solid precursors

LAM RES CORP0 citations39