Inventor

VINCENT DANIEL J

US3 patents

Patents

3 patents

US11152298B2Oct 19, 2021

Metal via structure

IBM3 citations71

US12243770B2Mar 4, 2025

Hard mask removal without damaging top epitaxial layer

IBM0 citations61

US11784120B2Oct 10, 2023

Metal via structure

IBM0 citations61