Inventor
LUCCHESI KEN
US6 patents
⚠️ This page may combine multiple inventors who share the name “LUCCHESI KEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
5 patentsUS9337000B2May 10, 2016
Control of impedance of RF return path
LAM RES CORP32 citations93
US9401264B2Jul 26, 2016
Control of impedance of RF delivery path
LAM RES CORP22 citations92
US10249476B2Apr 2, 2019
Control of impedance of RF return path
LAM RES CORP12 citations83
US10157730B2Dec 18, 2018
Control of impedance of RF delivery path
LAM RES CORP6 citations83
US12525458B2Jan 13, 2026
Plasma uniformity control using a pulsed magnetic field
LAM RES CORP0 citations62