Inventor
COOPERMAN STEVEN S
US3 patents
Patents
3 patentsUS5494857AFeb 27, 1996
Chemical mechanical planarization of shallow trenches in semiconductor substrates
DIGITAL EQUIPMENT CORP122 citations95
US5492858AFeb 20, 1996
Shallow trench isolation process for high aspect ratio trenches
DIGITAL EQUIPMENT CORP249 citations95
US5346584ASep 13, 1994
Planarization process for IC trench isolation using oxidized polysilicon filler
DIGITAL EQUIPMENT CORP48 citations90