Inventor
YEH FANG-YU
TW4 patents
Patents
4 patentsUS6943098B2Sep 13, 2005
Method of forming semiconductor device with non-conformal liner layer that is thinner on sidewall surfaces
PROMOS TECHNOLOGIES INC12 citations80
US6559044B1May 6, 2003
Method for forming contacts
PROMOS TECHNOLOGIES INC12 citations70
US7049245B2May 23, 2006
Two-step GC etch for GC profile and process window improvement
PROMOS TECHNOLOGIES INC3 citations58
US6929989B2Aug 16, 2005
Semiconductor device and manufacturing method thereof
PROMOS TECHNOLOGIES INC3 citations54