Inventor

NGUYEN VU NGOC TRAN

US6 patents

⚠️ This page may combine multiple inventors who share the name “NGUYEN VU NGOC TRAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

5 patents

US7297376B1Nov 20, 2007

Method to reduce gas-phase reactions in a PECVD process with silicon and organic precursors to deposit defect-free initial layers

APPLIED MATERIALS INC33 citations90

US7399364B2Jul 15, 2008

Hermetic cap layers formed on low-κ films by plasma enhanced chemical vapor deposition

APPLIED MATERIALS INC2 citations61

US7285503B2Oct 23, 2007

Hermetic cap layers formed on low-k films by plasma enhanced chemical vapor deposition

APPLIED MATERIALS INC4 citations61

US11145504B2Oct 12, 2021

Method of forming film stacks with reduced defects

APPLIED MATERIALS INC0 citations45

US10113234B2Oct 30, 2018

UV assisted silylation for porous low-k film sealing

APPLIED MATERIALS INC0 citations41

IBM

1 patent

US7615482B2Nov 10, 2009

Structure and method for porous SiCOH dielectric layers and adhesion promoting or etch stop layers having increased interfacial and mechanical strength

IBM6 citations61