Inventor

EDA MASATAKA

JP2 patents

Patents

2 patents

US7091294B2Aug 15, 2006

Fluoropolymer and resist composition

ASAHI GLASS CO LTD7 citations69

US7498393B2Mar 3, 2009

Fluorinated compound, fluoropolymer, resist composition, and composition for resist protective film

ASAHI GLASS CO LTD0 citations38