Inventor

SHIRAHAMA TAKEO

JP3 patents

Patents

3 patents

US7796664B2Sep 14, 2010

Semiconductor laser

MITSUBISHI ELECTRIC CORP0 citations49

US7288486B2Oct 30, 2007

Method for manufacturing semiconductor device having via holes

MITSUBISHI ELECTRIC CORP0 citations41

US7544611B2Jun 9, 2009

Method of manufacturing III-V nitride semiconductor device

MITSUBISHI ELECTRIC CORP0 citations39