Inventor

LU Yu-ying

TW2 patents

⚠️ This page may combine multiple inventors who share the name “LU Yu-ying”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG CO LTD

1 patent

US11194259B2Dec 7, 2021

Equipment module with enhanced protection from airborne contaminants, and method of operation

TAIWAN SEMICONDUCTOR MFG CO LTD3 citations67

TAIWAN SEMICONDUCTOR MFG

1 patent

US8872138B2Oct 28, 2014

Gas delivery for uniform film properties at UV curing chamber

TAIWAN SEMICONDUCTOR MFG0 citations35