Inventor

YANG SUNG-PO

TW2 patents

⚠️ This page may combine multiple inventors who share the name “YANG SUNG-PO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG CO LTD

1 patent

US11315810B2Apr 26, 2022

Apparatus for wafer processing

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations53

TAIWAN SEMICONDUCTOR MFG

1 patent

US8872138B2Oct 28, 2014

Gas delivery for uniform film properties at UV curing chamber

TAIWAN SEMICONDUCTOR MFG0 citations35