Inventor
HSIAO HAU-YI
TW15 patents
Patents
15 patentsUS11127635B1Sep 21, 2021
Techniques for wafer stack processing
TAIWAN SEMICONDUCTOR MFG CO LTD12 citations85
US11087971B2Aug 10, 2021
Method for manufacturing semiconductor device and manufacturing method of the same
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations72
US10504716B2Dec 10, 2019
Method for manufacturing semiconductor device and manufacturing method of the same
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US12500093B2Dec 16, 2025
Composite particulates for use as part of a supporting fill mixture in a semicondutor substrate stacking application
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12469817B2Nov 11, 2025
Support structure to reinforce stacked semiconductor wafers
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12293946B2May 6, 2025
Techniques for wafer stack processing
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12237165B2Feb 25, 2025
Method for wafer bonding including edge trimming
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12205855B2Jan 21, 2025
Process tool for analyzing bonded workpiece interface
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12087756B2Sep 10, 2024
Protective wafer grooving structure for wafer thinning and methods of using the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11552066B2Jan 10, 2023
Protective wafer grooving structure for wafer thinning and methods of using the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11545395B2Jan 3, 2023
Techniques for wafer stack processing
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12278151B2Apr 15, 2025
Semiconductor wafer seal ring having protrusion extending into trench in semiconductor substrate
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12272715B2Apr 8, 2025
High reflectance isolation structure to increase image sensor performance
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US11951569B2Apr 9, 2024
Damage prevention during wafer edge trimming
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US12519020B2Jan 6, 2026
Semiconductor processing tool and methods of operation
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51