P

Inventor

HUANG CHIH-HUI

TW48 patents
⚠️ This page may combine multiple inventors who share the name “HUANG CHIH-HUI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG CO LTD

40 patents
US9437572B2Sep 6, 2016

Conductive pad structure for hybrid bonding and methods of forming same

TAIWAN SEMICONDUCTOR MFG CO LTD227 citations99
US9728521B2Aug 8, 2017

Hybrid bond using a copper alloy for yield improvement

TAIWAN SEMICONDUCTOR MFG CO LTD227 citations98
US9960129B2May 1, 2018

Hybrid bonding mechanisms for semiconductor wafers

TAIWAN SEMICONDUCTOR MFG CO LTD22 citations94
US9490158B2Nov 8, 2016

Bond chuck, methods of bonding, and tool including bond chuck

TAIWAN SEMICONDUCTOR MFG CO LTD15 citations93
US9040385B2May 26, 2015

Mechanisms for cleaning substrate surface for hybrid bonding

TAIWAN SEMICONDUCTOR MFG CO LTD24 citations92
US11610812B2Mar 21, 2023

Multi-wafer capping layer for metal arcing protection

TAIWAN SEMICONDUCTOR MFG CO LTD7 citations86
US10734285B2Aug 4, 2020

Bonding support structure (and related process) for wafer stacking

TAIWAN SEMICONDUCTOR MFG CO LTD11 citations86
US9960200B1May 1, 2018

Selective deposition and planarization for a CMOS image sensor

TAIWAN SEMICONDUCTOR MFG CO LTD7 citations84
US9837291B2Dec 5, 2017

Wafer processing method and apparatus

TAIWAN SEMICONDUCTOR MFG CO LTD7 citations84
US9754813B2Sep 5, 2017

Bond chuck, methods of bonding, and tool including bond chuck

TAIWAN SEMICONDUCTOR MFG CO LTD5 citations84
US9728570B2Aug 8, 2017

Deep trench isolation fabrication for BSI image sensor

TAIWAN SEMICONDUCTOR MFG CO LTD7 citations84
US9508769B1Nov 29, 2016

Semiconductor structure and method of manufacturing the same

TAIWAN SEMICONDUCTOR MFG CO LTD8 citations84
US10134801B2Nov 20, 2018

Method of forming deep trench isolation in radiation sensing substrate and image sensor device

TAIWAN SEMICONDUCTOR MFG CO LTD7 citations83
US10526703B2Jan 7, 2020

Film formation apparatus for forming semiconductor structure having shower head with plural hole patterns and with corresponding different plural hole densities

TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US10475847B2Nov 12, 2019

Semiconductor device having stress-neutralized film stack and method of fabricating same

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10096515B2Oct 9, 2018

Interconnect structure for stacked device

TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US9842816B2Dec 12, 2017

Conductive pad structure for hybrid bonding and methods of forming same

TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US11087971B2Aug 10, 2021

Method for manufacturing semiconductor device and manufacturing method of the same

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations72
US10727097B2Jul 28, 2020

Mechanisms for cleaning substrate surface for hybrid bonding

TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US10504716B2Dec 10, 2019

Method for manufacturing semiconductor device and manufacturing method of the same

TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US10062656B2Aug 28, 2018

Composite bond structure in stacked semiconductor structure

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US12211741B2Jan 28, 2025

Multi-wafer capping layer for metal arcing protection

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US11862515B2Jan 2, 2024

Multi-wafer capping layer for metal arcing protection

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US11139210B2Oct 5, 2021

Bonding support structure (and related process) for wafer stacking

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US11041242B2Jun 22, 2021

Gas shower head with plural hole patterns and with corresponding different plural hole densities and film formation method

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations63
US12557401B2Feb 17, 2026

Method of forming deep trench isolation in radiation sensing substrate and image sensor device

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12237165B2Feb 25, 2025

Method for wafer bonding including edge trimming

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12142628B2Nov 12, 2024

Method of forming semiconductor device

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11915977B2Feb 27, 2024

Interconnect structure for stacked device

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11404470B2Aug 2, 2022

Method of forming deep trench isolation in radiation sensing substrate and image sensor device

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11387274B2Jul 12, 2022

Method of forming semiconductor device

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11276587B2Mar 15, 2022

Wafer bonding method and apparatus with curved surfaces

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11189654B2Nov 30, 2021

Manufacturing methods of semiconductor image sensor devices

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US10978345B2Apr 13, 2021

Interconnect structure for stacked device

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US10879288B2Dec 29, 2020

Reflector for backside illuminated (BSI) image sensor

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10504756B2Dec 10, 2019

Wafer processing method and apparatus

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10177106B2Jan 8, 2019

Conductive pad structure for hybrid bonding and methods of forming same

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10062720B2Aug 28, 2018

Deep trench isolation fabrication for BSI image sensor

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10510798B2Dec 17, 2019

Method of forming deep trench isolation in radiation sensing substrate and image sensor device

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US9859326B2Jan 2, 2018

Semiconductor devices, image sensors, and methods of manufacture thereof

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations42

TAIWAN SEMICONDUCTOR MFG

5 patents

LAI CHIH-YU

1 patent

TSAO CHUN-HAN

1 patent

SILICONWARE PRECISION INDUSTRIES CO LTD

1 patent