Inventor
HUANG CHIH-HUI
TW48 patents
⚠️ This page may combine multiple inventors who share the name “HUANG CHIH-HUI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
40 patentsUS9437572B2Sep 6, 2016
Conductive pad structure for hybrid bonding and methods of forming same
TAIWAN SEMICONDUCTOR MFG CO LTD227 citations99
US9728521B2Aug 8, 2017
Hybrid bond using a copper alloy for yield improvement
TAIWAN SEMICONDUCTOR MFG CO LTD227 citations98
US9960129B2May 1, 2018
Hybrid bonding mechanisms for semiconductor wafers
TAIWAN SEMICONDUCTOR MFG CO LTD22 citations94
US9490158B2Nov 8, 2016
Bond chuck, methods of bonding, and tool including bond chuck
TAIWAN SEMICONDUCTOR MFG CO LTD15 citations93
US9040385B2May 26, 2015
Mechanisms for cleaning substrate surface for hybrid bonding
TAIWAN SEMICONDUCTOR MFG CO LTD24 citations92
US11610812B2Mar 21, 2023
Multi-wafer capping layer for metal arcing protection
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations86
US10734285B2Aug 4, 2020
Bonding support structure (and related process) for wafer stacking
TAIWAN SEMICONDUCTOR MFG CO LTD11 citations86
US9960200B1May 1, 2018
Selective deposition and planarization for a CMOS image sensor
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations84
US9837291B2Dec 5, 2017
Wafer processing method and apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations84
US9754813B2Sep 5, 2017
Bond chuck, methods of bonding, and tool including bond chuck
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations84
US9728570B2Aug 8, 2017
Deep trench isolation fabrication for BSI image sensor
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations84
US9508769B1Nov 29, 2016
Semiconductor structure and method of manufacturing the same
TAIWAN SEMICONDUCTOR MFG CO LTD8 citations84
US10134801B2Nov 20, 2018
Method of forming deep trench isolation in radiation sensing substrate and image sensor device
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations83
US10526703B2Jan 7, 2020
Film formation apparatus for forming semiconductor structure having shower head with plural hole patterns and with corresponding different plural hole densities
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US10475847B2Nov 12, 2019
Semiconductor device having stress-neutralized film stack and method of fabricating same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10096515B2Oct 9, 2018
Interconnect structure for stacked device
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US9842816B2Dec 12, 2017
Conductive pad structure for hybrid bonding and methods of forming same
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US11087971B2Aug 10, 2021
Method for manufacturing semiconductor device and manufacturing method of the same
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations72
US10727097B2Jul 28, 2020
Mechanisms for cleaning substrate surface for hybrid bonding
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US10504716B2Dec 10, 2019
Method for manufacturing semiconductor device and manufacturing method of the same
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US10062656B2Aug 28, 2018
Composite bond structure in stacked semiconductor structure
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US12211741B2Jan 28, 2025
Multi-wafer capping layer for metal arcing protection
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US11862515B2Jan 2, 2024
Multi-wafer capping layer for metal arcing protection
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US11139210B2Oct 5, 2021
Bonding support structure (and related process) for wafer stacking
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US11041242B2Jun 22, 2021
Gas shower head with plural hole patterns and with corresponding different plural hole densities and film formation method
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations63
US12557401B2Feb 17, 2026
Method of forming deep trench isolation in radiation sensing substrate and image sensor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12237165B2Feb 25, 2025
Method for wafer bonding including edge trimming
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12142628B2Nov 12, 2024
Method of forming semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11915977B2Feb 27, 2024
Interconnect structure for stacked device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11404470B2Aug 2, 2022
Method of forming deep trench isolation in radiation sensing substrate and image sensor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11387274B2Jul 12, 2022
Method of forming semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11276587B2Mar 15, 2022
Wafer bonding method and apparatus with curved surfaces
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11189654B2Nov 30, 2021
Manufacturing methods of semiconductor image sensor devices
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US10978345B2Apr 13, 2021
Interconnect structure for stacked device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US10879288B2Dec 29, 2020
Reflector for backside illuminated (BSI) image sensor
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10504756B2Dec 10, 2019
Wafer processing method and apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10177106B2Jan 8, 2019
Conductive pad structure for hybrid bonding and methods of forming same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10062720B2Aug 28, 2018
Deep trench isolation fabrication for BSI image sensor
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10510798B2Dec 17, 2019
Method of forming deep trench isolation in radiation sensing substrate and image sensor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US9859326B2Jan 2, 2018
Semiconductor devices, image sensors, and methods of manufacture thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations42
TAIWAN SEMICONDUCTOR MFG
5 patentsUS9142517B2Sep 22, 2015
Hybrid bonding mechanisms for semiconductor wafers
TAIWAN SEMICONDUCTOR MFG247 citations98
US9331032B2May 3, 2016
Hybrid bonding and apparatus for performing the same
TAIWAN SEMICONDUCTOR MFG24 citations94
US9190441B2Nov 17, 2015
Image sensor trench isolation with conformal doping
TAIWAN SEMICONDUCTOR MFG5 citations73
US9252296B2Feb 2, 2016
Semiconductor device with compressive layers
TAIWAN SEMICONDUCTOR MFG1 citations52
US8377733B2Feb 19, 2013
Antireflective layer for backside illuminated image sensor and method of manufacturing same
TAIWAN SEMICONDUCTOR MFG1 citations52