Inventor
SAITOU SHUUJI
JP7 patents
Patents
7 patentsUS9929526B2Mar 27, 2018
Contact type power feeding apparatus
ULVAC INC2 citations67
US11345992B2May 31, 2022
Vacuum deposition apparatus
ULVAC INC0 citations48
US11462873B2Oct 4, 2022
Contact-type power supply apparatus and contact unit
ULVAC INC0 citations46
US11434562B2Sep 6, 2022
Can-roller for vacuum processing apparatus
ULVAC INC0 citations46
US11002366B2May 11, 2021
Gate valve device
ULVAC INC0 citations46
US10770275B2Sep 8, 2020
Film forming unit for sputtering apparatus
ULVAC INC0 citations36
US10378102B2Aug 13, 2019
Rotary cathode unit for magnetron sputtering apparatus
ULVAC INC0 citations36