Inventor

UNAMI HIROSHI

JP4 patents

⚠️ This page may combine multiple inventors who share the name “UNAMI HIROSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

OZAKI TAKASHI

2 patents

US8057599B2Nov 15, 2011

Substrate processing apparatus and method for manufacturing a semiconductor device

OZAKI TAKASHI14 citations91

US8282737B2Oct 9, 2012

Substrate processing apparatus and method for manufacturing a semiconductor device

OZAKI TAKASHI4 citations61

HITACHI INT ELECTRIC INC

1 patent

US8043431B2Oct 25, 2011

Substrate processing apparatus and method for manufacturing a semiconductor device

HITACHI INT ELECTRIC INC16 citations91

FUJIKIN KK

1 patent

US10527071B2Jan 7, 2020

Fluid control apparatus and method for attaching and detaching gas line section

FUJIKIN KK0 citations39