Inventor
TOMCZAK YOANN
BE3 patents
Patents
3 patentsUS12469703B2Nov 11, 2025
Methods for forming spacers and related structures
ASM IP HOLDING BV0 citations47
US11735422B2Aug 22, 2023
Method of forming a photoresist underlayer and structure including same
ASM IP HOLDING BV0 citations45
US12504689B2Dec 23, 2025
Photosensitive material and method of forming patterned structures
ASM IP HOLDING BV0 citations42