Inventor

HUDEK PETER

DE4 patents

⚠️ This page may combine multiple inventors who share the name “HUDEK PETER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

IMS IONEN MIKROFAB SYST

1 patent

US6136160AOct 24, 2000

Process for producing a carbon film on a substrate

IMS IONEN MIKROFAB SYST72 citations91

LEICA MICROSYS LITHOGRAPHY LTD

1 patent

US7241542B2Jul 10, 2007

Process for controlling the proximity effect correction

LEICA MICROSYS LITHOGRAPHY LTD11 citations82

VISTEC ELECTRON BEAM GMBH

1 patent

US7435517B2Oct 14, 2008

Method for reducing the fogging effect

VISTEC ELECTRON BEAM GMBH8 citations66

RANGELOW IVO

1 patent

US7141808B2Nov 28, 2006

Device and method for maskless AFM microlithography

RANGELOW IVO8 citations63