Inventor
IIJIMA ETSUO
JP5 patents
⚠️ This page may combine multiple inventors who share the name “IIJIMA ETSUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
4 patentsUS7504040B2Mar 17, 2009
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD81 citations95
US7476624B2Jan 13, 2009
Dry-etching method
TOKYO ELECTRON LTD3 citations60
US7531460B2May 12, 2009
Dry-etching method
TOKYO ELECTRON LTD2 citations51
US7183217B2Feb 27, 2007
Dry-etching method
TOKYO ELECTRON LTD1 citations47