Inventor
SHINOHE MASAHITO
JP3 patents
Patents
3 patentsUS7923371B2Apr 12, 2011
Method of manufacturing semiconductor device having contact plugs
TOSHIBA KK23 citations85
US7525142B2Apr 28, 2009
Semiconductor device including a conductive layer buried in an opening and method of manufacturing the same
TOSHIBA KK0 citations48
US7485909B2Feb 3, 2009
Semiconductor device and method of manufacturing the same
TOSHIBA KK1 citations48