Inventor
WAGNER DIETMAR
AT9 patents
⚠️ This page may combine multiple inventors who share the name “WAGNER DIETMAR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
4 patentsUS4291938ASep 29, 1981
Apparatus for dark field illumination
IBM57 citations94
US4681442AJul 21, 1987
Method for surface testing
IBM45 citations90
US6122037ASep 19, 2000
Reflective phaseshift lithography system
IBM9 citations71
US5063300ANov 5, 1991
Method and apparatus for determining line centers in a microminiature element
IBM0 citations38