Inventor
FOUQUET CHRISTOPHE DAVID
BE10 patents
Patents
10 patentsUS9507907B2Nov 29, 2016
Computational wafer inspection
ASML NETHERLANDS BV18 citations91
US11204239B2Dec 21, 2021
Metrology method, target and substrate
ASML NETHERLANDS BV7 citations83
US10718604B2Jul 21, 2020
Metrology method, target and substrate
ASML NETHERLANDS BV6 citations83
US10386176B2Aug 20, 2019
Metrology method, target and substrate
ASML NETHERLANDS BV5 citations83
US10579772B2Mar 3, 2020
Computational wafer inspection
ASML NETHERLANDS BV7 citations82
US9990462B2Jun 5, 2018
Computational wafer inspection
ASML NETHERLANDS BV8 citations82
US11428521B2Aug 30, 2022
Metrology method, target and substrate
ASML NETHERLANDS BV3 citations72
US11080459B2Aug 3, 2021
Computational wafer inspection
ASML NETHERLANDS BV2 citations71
US12429328B2Sep 30, 2025
Metrology method, target and substrate
ASML NETHERLANDS BV0 citations62
US12067340B2Aug 20, 2024
Computational wafer inspection
ASML NETHERLANDS BV0 citations61