Inventor
Liu xing lan
NL18 patents
Patents
18 patentsUS11204239B2Dec 21, 2021
Metrology method, target and substrate
ASML NETHERLANDS BV7 citations83
US10990018B2Apr 27, 2021
Computational metrology
ASML NETHERLANDS BV10 citations83
US10718604B2Jul 21, 2020
Metrology method, target and substrate
ASML NETHERLANDS BV6 citations83
US10386176B2Aug 20, 2019
Metrology method, target and substrate
ASML NETHERLANDS BV5 citations83
US11428521B2Aug 30, 2022
Metrology method, target and substrate
ASML NETHERLANDS BV3 citations72
US11187995B2Nov 30, 2021
Metrology using a plurality of metrology target measurement recipes
ASML NETHERLANDS BV2 citations72
US10331043B2Jun 25, 2019
Optimization of target arrangement and associated target
ASML NETHERLANDS BV6 citations72
US10025193B2Jul 17, 2018
Lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product
ASML NETHERLANDS BV3 citations72
US10474045B2Nov 12, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV6 citations71
US11347150B2May 31, 2022
Computational metrology
ASML NETHERLANDS BV2 citations70
US9879988B2Jan 30, 2018
Metrology method and apparatus, computer program and lithographic system
ASML NETHERLANDS BV4 citations70
US12429328B2Sep 30, 2025
Metrology method, target and substrate
ASML NETHERLANDS BV0 citations62
US11493851B2Nov 8, 2022
Lithographic method and lithographic apparatus
ASML NETHERLANDS BV0 citations62
US11156923B2Oct 26, 2021
Lithographic method and lithographic apparatus
ASML NETHERLANDS BV1 citations62
US11320750B2May 3, 2022
Determining an optimal operational parameter setting of a metrology system
ASML NETHERLANDS BV0 citations61
US10788761B2Sep 29, 2020
Determining an optimal operational parameter setting of a metrology system
ASML NETHERLANDS BV1 citations61
US12189302B2Jan 7, 2025
Computational metrology
ASML NETHERLANDS BV0 citations60
US10545410B2Jan 28, 2020
Lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product
ASML NETHERLANDS BV1 citations58