Inventor
BELTMAN JOHANNES MARCUS MARIA
NL8 patents
⚠️ This page may combine multiple inventors who share the name “BELTMAN JOHANNES MARCUS MARIA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
7 patentsUS11204239B2Dec 21, 2021
Metrology method, target and substrate
ASML NETHERLANDS BV7 citations83
US10718604B2Jul 21, 2020
Metrology method, target and substrate
ASML NETHERLANDS BV6 citations83
US10386176B2Aug 20, 2019
Metrology method, target and substrate
ASML NETHERLANDS BV5 citations83
US11428521B2Aug 30, 2022
Metrology method, target and substrate
ASML NETHERLANDS BV3 citations72
US10331043B2Jun 25, 2019
Optimization of target arrangement and associated target
ASML NETHERLANDS BV6 citations72
US12429328B2Sep 30, 2025
Metrology method, target and substrate
ASML NETHERLANDS BV0 citations62
US10725372B2Jul 28, 2020
Method and apparatus for reticle optimization
ASML NETHERLANDS BV0 citations49