Inventor
ADAM OMER ABUBAKER OMER
NL13 patents
Patents
13 patentsUS9134256B2Sep 15, 2015
Metrology method and apparatus, lithographic system and device manufacturing method
ASML NETHERLANDS BV29 citations93
US9355200B2May 31, 2016
Method and apparatus for design of a metrology target
ASML NETHERLANDS BV16 citations90
US11204239B2Dec 21, 2021
Metrology method, target and substrate
ASML NETHERLANDS BV7 citations83
US10718604B2Jul 21, 2020
Metrology method, target and substrate
ASML NETHERLANDS BV6 citations83
US10386176B2Aug 20, 2019
Metrology method, target and substrate
ASML NETHERLANDS BV5 citations83
US9804504B2Oct 31, 2017
Method and apparatus for design of a metrology target
ASML NETHERLANDS BV13 citations82
US10073357B2Sep 11, 2018
Measuring a process parameter for a manufacturing process involving lithography
ASML NETHERLANDS BV2 citations73
US10042268B2Aug 7, 2018
Method, apparatus and substrates for lithographic metrology
ASML NETHERLANDS BV5 citations73
US11428521B2Aug 30, 2022
Metrology method, target and substrate
ASML NETHERLANDS BV3 citations72
US12429328B2Sep 30, 2025
Metrology method, target and substrate
ASML NETHERLANDS BV0 citations62
US11320745B2May 3, 2022
Measuring a process parameter for a manufacturing process involving lithography
ASML NETHERLANDS BV0 citations62
US11016397B2May 25, 2021
Source separation from metrology data
ASML NETHERLANDS BV0 citations62
US9719945B2Aug 1, 2017
Metrology method and apparatus, lithographic system and device manufacturing method
ASML NETHERLANDS BV0 citations51