Inventor
CHEN TZU-HSIANG
TW14 patents
⚠️ This page may combine multiple inventors who share the name “CHEN TZU-HSIANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
13 patentsUS9625824B2Apr 18, 2017
Extreme ultraviolet lithography collector contamination reduction
TAIWAN SEMICONDUCTOR MFG CO LTD30 citations93
US10790326B2Sep 29, 2020
Pixel device on deep trench isolation (DTI) structure for image sensor
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US9665007B2May 30, 2017
Rotary EUV collector
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US12543395B2Feb 3, 2026
Semiconductor structure and method of manufacturing the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12369422B2Jul 22, 2025
Pixel device on deep trench isolation (DTI) structure for image sensor
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11996431B2May 28, 2024
Pixel device on deep trench isolation (DTI) structure for image sensor
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11393863B2Jul 19, 2022
Pixel device on deep trench isolation (DTI) structure for image sensor
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11374046B2Jun 28, 2022
Semiconductor structure and method of manufacturing the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US10872918B2Dec 22, 2020
Optical isolation structure for reducing crosstalk between pixels and fabrication method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10658409B2May 19, 2020
Semiconductor structure and method of manufacturing the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US9476764B2Oct 25, 2016
Wavefront adjustment in extreme ultra-violet (EUV) lithography
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US9429858B2Aug 30, 2016
Rotary EUV collector
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations52
US9034665B2May 19, 2015
Tool configuration and method for extreme ultra-violet (EUV) patterning with a deformable reflective surface
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52