Inventor
TAKAHASHI MOTOHIRO
JP23 patents
⚠️ This page may combine multiple inventors who share the name “TAKAHASHI MOTOHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
16 patentsUS10056226B2Aug 21, 2018
Charged particle beam apparatus and vibration damper for charged particle beam apparatus
HITACHI HIGH TECH CORP2 citations69
US12573584B2Mar 10, 2026
Stage device, charged particle beam device, and vacuum device
HITACHI HIGH TECH CORP0 citations62
US10770259B2Sep 8, 2020
Stage device and charged particle beam device
HITACHI HIGH TECH CORP1 citations62
US10586676B2Mar 10, 2020
Charged particle beam device
HITACHI HIGH TECH CORP1 citations62
US8946652B2Feb 3, 2015
Sample positioning apparatus, sample stage, and charged particle beam apparatus
HITACHI HIGH TECH CORP2 citations62
US12469671B2Nov 11, 2025
Stage apparatus and charged particle beam apparatus including stage apparatus
HITACHI HIGH TECH CORP0 citations61
US11049687B2Jun 29, 2021
Stage apparatus and charged particle beam apparatus
HITACHI HIGH TECH CORP1 citations61
US10840059B2Nov 17, 2020
Charged particle radiation device
HITACHI HIGH TECH CORP1 citations57
US11342156B2May 24, 2022
Charged particle beam apparatus, sample alignment method of charged particle beam apparatus
HITACHI HIGH TECH CORP0 citations52
US10804067B2Oct 13, 2020
Charged particle beam apparatus comprising a controller to set control parameters based on movement of the sample stage
HITACHI HIGH TECH CORP0 citations52
US10366912B2Jul 30, 2019
Stage apparatus and charged particle beam apparatus
HITACHI HIGH TECH CORP0 citations52
US12400826B2Aug 26, 2025
Charged particle beam device
HITACHI HIGH TECH CORP0 citations51
US10879033B2Dec 29, 2020
Stage apparatus, and charged particle beam apparatus
HITACHI HIGH TECH CORP0 citations51
US10658151B2May 19, 2020
Stage device and charged particle beam device
HITACHI HIGH TECH CORP0 citations51
US10600614B2Mar 24, 2020
Stage device and charged particle beam device
HITACHI HIGH TECH CORP0 citations51
US9905393B2Feb 27, 2018
Stage apparatus with braking system for lens, beam, or vibration compensation
HITACHI HIGH TECH CORP0 citations41