Inventor
OGAWA HIRONORI
JP37 patents
⚠️ This page may combine multiple inventors who share the name “OGAWA HIRONORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
18 patentsUS10591018B2Mar 17, 2020
Vibration-suppressing mechanism to be attached to charged particle beam device, and charged particle beam device
HITACHI HIGH TECH CORP2 citations73
US9502208B2Nov 22, 2016
Charged particle beam apparatus, stage controlling method, and stage system
HITACHI HIGH TECH CORP4 citations73
US11664185B2May 30, 2023
Vibration damping system for charged particle beam apparatus
HITACHI HIGH TECH CORP0 citations62
US10770259B2Sep 8, 2020
Stage device and charged particle beam device
HITACHI HIGH TECH CORP1 citations62
US10586676B2Mar 10, 2020
Charged particle beam device
HITACHI HIGH TECH CORP1 citations62
US8946652B2Feb 3, 2015
Sample positioning apparatus, sample stage, and charged particle beam apparatus
HITACHI HIGH TECH CORP2 citations62
US11049687B2Jun 29, 2021
Stage apparatus and charged particle beam apparatus
HITACHI HIGH TECH CORP1 citations61
US11342156B2May 24, 2022
Charged particle beam apparatus, sample alignment method of charged particle beam apparatus
HITACHI HIGH TECH CORP0 citations52
US10804067B2Oct 13, 2020
Charged particle beam apparatus comprising a controller to set control parameters based on movement of the sample stage
HITACHI HIGH TECH CORP0 citations52
US10366912B2Jul 30, 2019
Stage apparatus and charged particle beam apparatus
HITACHI HIGH TECH CORP0 citations52
US12400826B2Aug 26, 2025
Charged particle beam device
HITACHI HIGH TECH CORP0 citations51
US11342211B2May 24, 2022
Wafer inspection apparatus and wafer inspection method
HITACHI HIGH TECH CORP0 citations51
US10879033B2Dec 29, 2020
Stage apparatus, and charged particle beam apparatus
HITACHI HIGH TECH CORP0 citations51
US10658151B2May 19, 2020
Stage device and charged particle beam device
HITACHI HIGH TECH CORP0 citations51
US10600614B2Mar 24, 2020
Stage device and charged particle beam device
HITACHI HIGH TECH CORP0 citations51
US9627173B2Apr 18, 2017
Stage device and charged particle beam apparatus using the stage device
HITACHI HIGH TECH CORP0 citations51
US9905393B2Feb 27, 2018
Stage apparatus with braking system for lens, beam, or vibration compensation
HITACHI HIGH TECH CORP0 citations41
US10153128B2Dec 11, 2018
Charged particle beam apparatus and sample elevating apparatus
HITACHI HIGH TECH CORP0 citations39
DAIHEN CORP
10 patentsUS6109860AAug 29, 2000
Two-armed transfer robot
DAIHEN CORP63 citations95
US5950495ASep 14, 1999
Two-armed transfer robot
DAIHEN CORP70 citations94
US6102649AAug 15, 2000
Two-armed transfer robot
DAIHEN CORP36 citations92
USRE37731EJun 11, 2002
Two-armed transfer robot
DAIHEN CORP23 citations91
US6293746B1Sep 25, 2001
Transfer robot
DAIHEN CORP39 citations91
US6190114B1Feb 20, 2001
Transfer robot
DAIHEN CORP41 citations91
US5975834ANov 2, 1999
Two-armed transfer robot
DAIHEN CORP47 citations91
US7114907B2Oct 3, 2006
Transfer robot
DAIHEN CORP33 citations90
US7306423B2Dec 11, 2007
Linear moving mechanism and transfer robot using the same
DAIHEN CORP44 citations87
US7056080B2Jun 6, 2006
Two-arm transfer robot
DAIHEN CORP12 citations82
HITACHI LTD
3 patentsUS9673021B2Jun 6, 2017
Positioning control device
HITACHI LTD4 citations73
US11417496B2Aug 16, 2022
Stage device, charged particle beam apparatus, and vacuum apparatus
HITACHI LTD0 citations62
US10296015B2May 21, 2019
Frequency-characteristics measurement method and positioning control device
HITACHI LTD0 citations41