Inventor

GREGORY RICHARD B

US3 patents

Patents

3 patents

US4755865AJul 5, 1988

Means for stabilizing polycrystalline semiconductor layers

MOTOROLA INC208 citations97

US4682407AJul 28, 1987

Means and method for stabilizing polycrystalline semiconductor layers

MOTOROLA INC60 citations94

US4740481AApr 26, 1988

Method of preventing hillock formation in polysilicon layer by oxygen implanation

MOTOROLA INC34 citations91