Inventor
ARMACOST MICHAEL DAVID
US6 patents
⚠️ This page may combine multiple inventors who share the name “ARMACOST MICHAEL DAVID”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
5 patentsUS6051504AApr 18, 2000
Anisotropic and selective nitride etch process for high aspect ratio features in high density plasma
IBM39 citations90
US5767017AJun 16, 1998
Selective removal of vertical portions of a film
IBM15 citations71
US5714798AFeb 3, 1998
Selective deposition process
IBM6 citations70
US6139647AOct 31, 2000
Selective removal of vertical portions of a film
IBM5 citations60
US5885899AMar 23, 1999
Method of chemically mechanically polishing an electronic component using a non-selective ammonium hydroxide slurry
IBM5 citations58