Inventor
HAN MYUNG PIL
KR5 patents
Patents
5 patentsUS11173439B2Nov 16, 2021
Flow path switching type collecting apparatus of by-product for semiconductor manufacturing process
MILAEBO CO LTD7 citations82
US11117086B2Sep 14, 2021
Apparatus for collecting by-product of semiconductor manufacturing process
MILAEBO CO LTD7 citations82
US10801107B2Oct 13, 2020
Apparatus for collecting by-product in semiconductor process
MILAEBO CO LTD3 citations71
US11562943B2Jan 24, 2023
Apparatus for collecting by-product in semiconductor manufacturing process
MILAEBO CO LTD0 citations49
US11462422B2Oct 4, 2022
Apparatus having cooling line for collecting by-product in semiconductor manufacturing process
MILAEBO CO LTD0 citations49