Inventor

JEON SEULGEE

KR2 patents

Patents

2 patents

US11527399B2Dec 13, 2022

Wafer cleaning apparatus based on light irradiation and wafer cleaning system including the same

SAMSUNG ELECTRONICS CO LTD1 citations53

US11302526B2Apr 12, 2022

Supercritical drying apparatus and method of drying substrate using the same

SAMSUNG ELECTRONICS CO LTD0 citations48