Inventor
DAVIES DYLAN JOHN DAVID
NL4 patents
Patents
4 patentsUS10241418B2Mar 26, 2019
Method and apparatus for obtaining diagnostic information relating to a lithographic manufacturing process, lithographic processing system including diagnostic apparatus
ASML NETHERLANDS BV9 citations80
US10613445B2Apr 7, 2020
Methods and apparatus for obtaining diagnostic information relating to a lithographic manufacturing process
ASML NETHERLANDS BV3 citations69
US12204252B2Jan 21, 2025
Method for decision making in a semiconductor manufacturing process
ASML NETHERLANDS BV0 citations56
US11687007B2Jun 27, 2023
Method for decision making in a semiconductor manufacturing process
ASML NETHERLANDS BV1 citations56