Inventor
POKIDOV ILYA
US12 patents
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MKS INSTR INC
10 patentsUS10940635B2Mar 9, 2021
Method and apparatus for processing dielectric materials using microwave energy
MKS INSTR INC2 citations72
US10071521B2Sep 11, 2018
Method and apparatus for processing dielectric materials using microwave energy
MKS INSTR INC2 citations72
US11956885B2Apr 9, 2024
Method and apparatus for impedance matching in a power delivery system for remote plasma generation
MKS INSTR INC3 citations68
US9653266B2May 16, 2017
Microwave plasma applicator with improved power uniformity
MKS INSTR INC3 citations67
US12075554B2Aug 27, 2024
Plasma source having a dielectric plasma chamber with improved plasma resistance
MKS INSTR INC0 citations62
US11019715B2May 25, 2021
Plasma source having a dielectric plasma chamber with improved plasma resistance
MKS INSTR INC1 citations62
US12289820B2Apr 29, 2025
Method and apparatus for impedance matching in a power delivery system for remote plasma generation
MKS INSTR INC0 citations56
US9991098B2Jun 5, 2018
Toroidal plasma abatement apparatus and method
MKS INSTR INC0 citations51
US9630142B2Apr 25, 2017
Toroidal plasma abatement apparatus and method
MKS INSTR INC0 citations51
US12207385B2Jan 21, 2025
Method and apparatus for plasma ignition in toroidal plasma sources
MKS INSTR INC0 citations49