P

Inventor

SEILHEIMER RICHARD A

US4 patents
⚠️ This page may combine multiple inventors who share the name “SEILHEIMER RICHARD A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

3 patents
US4911597AMar 27, 1990

Semiconductor processing system with robotic autoloader and load lock

APPLIED MATERIALS INC128 citations95
US5280983AJan 25, 1994

Semiconductor processing system with robotic autoloader and load lock

APPLIED MATERIALS INC108 citations94
US5224809AJul 6, 1993

Semiconductor processing system with robotic autoloader and load lock

APPLIED MATERIALS INC60 citations94

SILICON VALLEY GROUP

1 patent
US5320680AJun 14, 1994

Primary flow CVD apparatus comprising gas preheater and means for substantially eddy-free gas flow

SILICON VALLEY GROUP74 citations95