Inventor
ABOLNIKOV EDWARD M
US3 patents
Patents
3 patentsUS4911597AMar 27, 1990
Semiconductor processing system with robotic autoloader and load lock
APPLIED MATERIALS INC128 citations95
US5280983AJan 25, 1994
Semiconductor processing system with robotic autoloader and load lock
APPLIED MATERIALS INC108 citations94
US5224809AJul 6, 1993
Semiconductor processing system with robotic autoloader and load lock
APPLIED MATERIALS INC60 citations94