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Inventor
HIERONYMI ROBERT G
US
3 patents
⚠️ This page may combine multiple inventors who share the name “HIERONYMI ROBERT G”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VEECO INSTR INC
2 patents
US6299740B1
Oct 9, 2001
Sputtering assembly and target therefor
VEECO INSTR INC
60 citations
91
US6395146B2
May 28, 2002
Sputtering assembly and target therefor
VEECO INSTR INC
20 citations
87
MATERIALS RESEARCH CORP
1 patent
US4428816A
Jan 31, 1984
Focusing magnetron sputtering apparatus
MATERIALS RESEARCH CORP
27 citations
90