Inventor

HASEGAWA CHIHIRO

JP5 patents

⚠️ This page may combine multiple inventors who share the name “HASEGAWA CHIHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

UBE INDUSTRIES

3 patents

US7595414B2Sep 29, 2009

Metal complex compound comprising β-diketonato ligand

UBE INDUSTRIES4 citations57

US9194041B2Nov 24, 2015

Tris(dialkylamide)aluminum compound, and method for producing aluminum-containing thin film using same

UBE INDUSTRIES1 citations48

US6992200B2Jan 31, 2006

Copper complexes and process for formation of copper-containing thin films by using the same

UBE INDUSTRIES0 citations45

KADOTA TAKUMI

1 patent

US8304567B2Nov 6, 2012

Organoruthenium complex, and method for production of ruthenium thin film using the ruthenium complex

KADOTA TAKUMI12 citations75

ZAMA HIDEAKI

1 patent

US8183153B2May 22, 2012

Method for manufacturing semiconductor device

ZAMA HIDEAKI0 citations41