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Inventor
WATANUKI KOUHEI
JP
2 patents
Patents
2 patents
US7595414B2
Sep 29, 2009
Metal complex compound comprising β-diketonato ligand
UBE INDUSTRIES
4 citations
57
US6992200B2
Jan 31, 2006
Copper complexes and process for formation of copper-containing thin films by using the same
UBE INDUSTRIES
0 citations
45