Inventor

INAMOTO TAKURO

JP4 patents

Patents

4 patents

US10181514B2Jan 15, 2019

Vertical semiconductor device and manufacturing method thereof

FUJI ELECTRIC CO LTD2 citations70

US10297450B2May 21, 2019

Manufacturing method of SiC substrate

FUJI ELECTRIC CO LTD0 citations47

US10068762B2Sep 4, 2018

Manufacture method of gate insulating film for silicon carbide semiconductor device

FUJI ELECTRIC CO LTD0 citations47

US10037886B2Jul 31, 2018

Method of manufacturing silicon carbide semiconductor device using graphene and hexagonal boron nitride

FUJI ELECTRIC CO LTD0 citations47