Inventor
ASAKAWA DAISUKE
JP4 patents
Patents
4 patentsUS12044967B2Jul 23, 2024
Actinic-ray-sensitive or radiation-sensitive resin composition, resist film, pattern formation method, and method for manufacturing electronic device
FUJIFILM CORP2 citations58
US12007688B2Jun 11, 2024
Actinic ray-sensitive or radiation-sensitive resin composition, resist film, pattern forming method, method for manufacturing electronic device, and resin
FUJIFILM CORP0 citations58
US12032290B2Jul 9, 2024
Actinic ray-sensitive or radiation-sensitive resin composition, resist film, pattern forming method, and method for manufacturing electronic device
FUJIFILM CORP0 citations50
US11073762B2Jul 27, 2021
Actinic ray-sensitive or radiation sensitive resin composition, actinic raysensitive or radiation-sensitive film, pattern forming method, method for manufacturing electronic device, and photoacid generator
FUJIFILM CORP0 citations48