Inventor
CHANG YI-TING
TW7 patents
⚠️ This page may combine multiple inventors who share the name “CHANG YI-TING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
3 patentsUS11239099B2Feb 1, 2022
Tool monitoring device and method of monitoring tool
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations68
US11804392B2Oct 31, 2023
Method of monitoring tool
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations58
US11569062B2Jan 31, 2023
Gas delivery system for ion implanter
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49